1200 degree slide furnace realizes the functions of heating and annealing. The inlet end is equipped with a high-precision three-way mass flowmeter to accurately control the atmosphere in the tube; at the same time, the equipment is equipped with a turbo molecular pump set, which can quickly reach high The vacuum environment can eliminate the interference of the air atmosphere to the experiment to the greatest extent.
Advantages of slide furnaces:
1200 degree slide furnace consists of a 1200°C standard single-temperature zone tube furnace and a high-precision slide rail. The tube furnace is heated by resistance wire and cooperates with the polycrystalline fiber hearth, which has excellent heating and heat preservation performance. The slide rail slide table fits tightly, slides smoothly, and is easy to operate. At the same time, the tube furnace is operated with a full-color LCD touch screen, which is simple, intuitive and easy to use, which can simplify the experimental operation and save the test time.
sliding furnace technical parameter:
| Model | CY-OTF-1200X-80-IIII-4CV-SL CVD furnace |
| Tube furnace | Display LED
Max. Temperature 1200℃ Continuous Working Temp. ≤1100℃ Heating Rate 0~20℃/min Temperature Zone three Accuracy ±1℃ Sapphire Tube dia：80mm Length：2000mm Temperature Control PID automatic control via SCR power control Heating curves 30 steps programmable Heating zone:400-400-400mm Power 220V, 50 Hz, single phase |
| Furnace structure | High purity Al2O3 insulation chamber guarantees excellent temperature uniformity.
Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation. Sliding flange assembly are made of stainless steel. |
| Heating element | Resistance wire |
| Thermal couple | K Type(two pieces,one for temperature oven, and the other must be in the hold in order to measure the real temperature of the sample being prepared) |
| Working voltage | AC110-480V 50/60 Hz |
| Temperature control | PID automatic control via SCR power control |
| Chamber material | Alumina Fiber |
| Flange connection | Stainless steel water-cooled flange |
| Sliding Rail | 2000mm long sliding rail is installed with one end flange to make loading & unload sample easy. |
| Mass Flow meters | Working Temp.: 5~45 ºC
Max. Pressure: 3×106 Pa Accuracy: ±1.5% FS Liner: ±（0.5-1.5）%F.S. Duplicate accuracy: ±0.2%F.S. Controlling Range: Controller 1: 0~100 SCCM Controller 2: 1~200 SCCM Controller 3: 1~500SCCM Controller 4: 1~500SCCM |