slideable RTP tube furnace with Infrared Light Heating and Slide Cooling. It is capable of achieving a max. heating rate > 50°C/s and a cooling rate > 10°C/s. slideable RTP tube furnace is designed for growing graphene and carbon nanotubes by CVD.
slideable RTP tube furnace technical parameter:
| Furnace Structure | Double layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
One set of sliding rails is installed which allows furnace move from one side to the other side automatically at variable speeds using the control knob. Vacuum flanges and the digital vacuum gauge are installed for immediate use. |
| Power | 9KW |
| Voltage | AC 208-240V Single Phase, 50/60 Hz |
| Max. Temperature | 1000°C (<1 hour)
800°C (<2 hours) 600°C (continuous) Note: RTP furnaces should not be heated for long durations due to thin refractories. |
| Temperature Accuracy | +/ – 2°C |
| Max. Heating Rate | 50 ºC/s |
| Process Tube Size | High purity fused quartz tube Ø4″ OD x 1400mm L |
| Sliding Rails / Table | Dual sliding rails made of Cr plated steel
Sliding rail length: 1200 mm Driven by DC motor |
| Sliding Control | Automatic sliding is controlled by the temperature controller. When the heating program is finished, the furnace will slide from right to left at the set speed. Air fans will blow heated area to achieve fast cooling.
Sliding Range: 340mm Sliding Speed: 0-70 mm/s; adjustable |
| Heating Elements | 8 pcs Paralleled Infrared Heating ( 1200w each) |
| Thermocouple | K type, 1/4″ Dia x 24″ length |
| Vacuum Flanges | Stainless steel vacuum flanges are installed on both ends of the tube.
Right flange: Hinge-type flange for easy sample loading 1/4″diameter feedthrough for inserting K-type thermal couple Needle valve with barb gas fitting is built in Left flange: Digital vacuum gauge is included KF25 right angle valve is installed for connecting to a vacuum pump Needle valve for vacuum release is included |
| Vacuum Level | Limited by vacuum pump
10^-2 torr can be achieved by mechanical pump 10^-4 torr can be reached by molecular pump |
| Flow Meter | One flow-meter is built in with range: 16-160 ml/min |
| Dimensions | 460 x 330 x 520 mm ( furnace only)
1800 x 450 x 680 mm ( furnace + sliding) (click to enlarge the picture) |
| Net Weight | 74″ x 39″ x 45″ |
| Shipping Weight | 300 lbs |